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A secure collaborative e-diagnostics framework for semiconductor factories

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6 Author(s)
Min-Hsiung Hung ; Dept. of Electr. Eng., Nat. Defence Univ., Taoyuan, Taiwan ; Feng-Yi Hsu ; Tsung-Li Wang ; Fan-Tien Cheng
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According to the collaborative diagnostics functions and the interface C requirements suggested in the recent e-diagnostics guidebook of International SEMATECH, this paper proposes a novel e-diagnostics framework, called secure collaborative e-diagnostics framework (SCDF). SCDF is developed based on the technologies of Web services, clustering, and new-generation information security. In addition to providing a variety of e-diagnostics functions, SCDF possesses mechanisms to solve several important issues, such as data isolation for different suppliers, supporting remote diagnoses through multi-party collaboration, diagnostics service and storage failover for assuring system availability and the security measures related to above issues. SCDF provides a possible solution to part of the e-diagnostics interface C and can be applied in semiconductor industry to increase the equipment effectiveness and availability.

Published in:

Automation Science and Engineering, 2005. IEEE International Conference on

Date of Conference:

1-2 Aug. 2005