Referenced Items are not available for this document.
A differential method using the spherical open resonator is developed for permittivity measurement of a thin dielectric film on an optically dense substrate. It is based on a measurement of the resonant frequency shift due to the thin film on the substrate. The accuracy of the method is demonstrated to be about 4% for a 5.6-μm photoresist film at 142 GHz.
Published in:
Microwave and Wireless Components Letters, IEEE
(Volume:15
,
Issue:
9
)
Date of Publication: Sept. 2005
- Page(s):
- 564 - 566
- ISSN :
- 1531-1309
- INSPEC Accession Number:
- 8578356
- Digital Object Identifier :
- 10.1109/LMWC.2005.855370
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 06 September 2005
- Issue Date :
- Sept. 2005
- Sponsored by :
- IEEE Microwave Theory and Techniques Society
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