By Topic

Millimeter-wave permittivity measurement of deposited dielectric films using the spherical open resonator

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
S. N. Dudorov ; MilliLab, Helsinki Univ. of Technol., Finland ; D. V. Lioubtchenko ; J. A. Mallat ; A. V. Raisanen

A differential method using the spherical open resonator is developed for permittivity measurement of a thin dielectric film on an optically dense substrate. It is based on a measurement of the resonant frequency shift due to the thin film on the substrate. The accuracy of the method is demonstrated to be about 4% for a 5.6-μm photoresist film at 142 GHz.

Published in:

IEEE Microwave and Wireless Components Letters  (Volume:15 ,  Issue: 9 )