Referenced Items are not available for this document.
A focusing grating coupler (FGC) for focusing a guided wave into a spot in free space was fabricated in a III-V semiconductor waveguide for the first time. A FGC of 0.83-mm focal length and 0.5-mm*0.5-mm aperture for an AlGaAs waveguide and 0.83- mu m wavelength was designed and fabricated by electron-beam writing and reactive ion etching. Nearly diffraction-limited focus spot size of 2 mu m and a coupling efficiency of 20% were obtained.<
Published in:
Photonics Technology Letters, IEEE
(Volume:4
,
Issue:
8
)
Date of Publication: Aug. 1992
- Page(s):
- 903 - 905
- ISSN :
- 1041-1135
- INSPEC Accession Number:
- 4273228
- Digital Object Identifier :
- 10.1109/68.149903
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 06 August 2002
- Issue Date :
- Aug. 1992
- Sponsored by :
- IEEE Photonics Society
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