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High-performance inductors on plastic substrate

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5 Author(s)
Guo, L.H. ; Inst. of Microelectron., Singapore ; Zhang, Q.X. ; Lo, G.Q. ; Balasubramanian, N.
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Wafer-transfer technology (WTT) has been applied to transfer RF inductors from a silicon wafer to an opaque plastic substrate (FR-4). By completely eliminating silicon substrate, the high performance of integrated inductors (Q-factor > 30 for inductance ∼3 nH with resonant frequency ∼23 GHz) has been achieved. Based on the analysis of a modified π-network model, our results suggest that the performance limitation is switched from being a synthetic mechanism of substrate and metal-ohmic losses on low resistivity Si-substrate to merely a metal-ohmic loss on FR-4. Thus, the inductor patterns, which are optimized currently for RFICs on silicon wafer, can be further optimized to take full advantage of the WTT on new substrate from the newly obtained design freedom.

Published in:

Electron Device Letters, IEEE  (Volume:26 ,  Issue: 9 )