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Polymer microlens arrays applicable to AlInGaN ultraviolet micro-light-emitting diodes

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5 Author(s)
Jeon, C.W. ; Inst. of Photonics, Univ. of Strathclyde, Glasgow, UK ; Gu, E. ; Liu, C. ; Girkin, J.M.
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We report on the fabrication of high-optical-quality microlens arrays based on ultraviolet (UV)-curable polymer adhesive. The lenses are suitable, amongst other applications, for high-transmission and projection of the output of UV micropixellated light-emitting diodes. The microlenses were fabricated using a resist-reflow technique with reactive ion etching. An O2--CF4 etch-gas chemistry, where atomic fluorine eliminates the carbon-related polymer residue at the etch front effectively, resulted in etch rates of 1.4 μm per minute for the polymer. Spherical microlenses of root mean square surface roughness 3 nm were obtained.

Published in:

Photonics Technology Letters, IEEE  (Volume:17 ,  Issue: 9 )

Date of Publication:

Sept. 2005

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