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Resonant sensor for high accuracy pressure measurement using silicon technology

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3 Author(s)
Parsons, P. ; Schlumberger Ind., Farnborough, UK ; Glendinning, A. ; Angelidis, D.

A resonant-element transducer developed for aerospace applications using micromachined silicon technology is described. The sensor is a beam supported over a square diaphragm. The resonant frequency of the beam is proportional to the applied pressure on the diaphragm. Results presented show that the prototype's performance rivals that of current high-accuracy pressure transducers.<>

Published in:

Aerospace and Electronic Systems Magazine, IEEE  (Volume:7 ,  Issue: 7 )

Date of Publication:

July 1992

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