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A low impedance VHF micromechanical filter using coupled-array composite resonators

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2 Author(s)
Demirci, M.U. ; Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA ; Nguyen, C.T.-C.

By using mechanically-coupled flexural-mode square resonator arrays as "composite" resonators, the impedance of a 68.1-MHz (VHF), capacitively-transduced micromechanical filter has been lowered to point of allowing L-network-aided matching to 50Ω termination impedances, while also exhibiting less than 2.7dB insertion loss (IL) for a 190kHz passband width (0.28% bandwidth). The use of composite arrays to replace previous single resonators in a series filter topology not only allows a reduction in filter termination resistance by a factor ideally equal to the number of resonators in the array, but also a reduction in filter bandwidth by this same factor $an important feature for channel-select applications. Although array Q values are smaller than the Q of a stand-alone square resonator, they are still sufficient for excellent filter performance.

Published in:

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on  (Volume:2 )

Date of Conference:

5-9 June 2005