Cartesian lattice spinning current method for the simple extraction of /spl sigma//sub xx/- /spl sigma//sub yy/ and /spl sigma//sub xy/ stresses and the Hall voltage from four-contact elements

This paper reports on a novel operating method for Hall and stress sensors with four terminals. It is based on the continuous spinning current (CSC) method. CSC methods have been successfully presented for Hall sensors and four-terminal multidimensional stress sensors. The new approach eliminates the substantial limitations that the CSC method faces in integrated mixed signal systems. These limitations are due to the need of precision current sources and the computing power required extracting the signals. The orthogonally superposed sinusoidal currents, characteristic of the CSC method, are replaced by currents that only vary among the three discrete levels - I/sub 0/, 0, and I/sub 0/. The resulting eight current vectors lie on a Cartesian lattice. Two stress components and the Hall voltage can be extracted from the voltage drops between opposite contacts for these eight biasing conditions.