By Topic

Preparation and characterization of multifunctional thin film sensors based on amorphous diamond-like-carbon

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Luthje, H. ; Fraunhofer Inst. for Surface Eng. & Thin Films, Germany ; Biehl, S. ; Bandorf, R. ; Sick, J.-H.
more authors

Amorphous carbon thin films also named diamond-like-carbon (DLC) are well known for their hardness, wear resistant and low friction behavior in tribological contacts. This paper deals with an additional aspect of this material, namely piezoresistivity of DLC films, which makes DLC based coatings to novel multifunctional surfaces with superior sensoric properties. DLC was prepared at low temperatures (<150°C) with piezo k-factors of some 100 to 1200. We show that this excellent coating can be prepared with optimum properties for force/pressure transducer and tribological coating as well. This allows direct measurements at mechanically treated surfaces.

Published in:

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on  (Volume:2 )

Date of Conference:

5-9 June 2005