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Nano electromechanical transducer based on single walled carbon nanotubes

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3 Author(s)
Stampfer, C. ; Dept. of Micro & Nanosyst., ETH Zurich, Switzerland ; Jungen, A. ; Hierold, C.

We report on the fabrication and characterization of a nanometer-scale electromechanical transducer based on individual single walled carbon nanotubes (SWNTs). Each nano electro-mechanical device incorporates one electrically connected and suspended SWNT (d ∼ 1nm), which is placed underneath a freestanding 200 nm wide metal (2nm Cr and 30-50nm Au) cantilever. We present mechanical and electromechanical measurements of the cantilever based device and show that the resistance of the SWNT changes significantly by a factor of approximately 3 when slightly deflecting the Au cantilever by 40nm.

Published in:

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on  (Volume:2 )

Date of Conference:

5-9 June 2005

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