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Control the shape and curvature of micromachined cantilever using multiple plasma chemistry bonding technology

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5 Author(s)
Wang-Shen Su ; MEMS Inst., National Tsing-Hua Univ., Hsinchu, Taiwan ; Sheng-Ta Lee ; Cheng-Yu Lin ; Weileun Fang
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This study reports a novel method for tuning the deflection profile of micromachined cantilever by means of multiple plasma surface modification. In short, the shape and curvature of the cantilever can be tuned using the combination of plasma treatments along the beam length and the beam width, respectively. To demonstrate the feasibility of this approach, various NH3 plasma treatments were employed to tune the deflection profile of cantilevers made of SiO2 film. The deflection profiles predicted by the simulation and analysis agree with that determined from measurement.

Published in:

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on  (Volume:2 )

Date of Conference:

5-9 June 2005