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Thermally stable micro hot wire sensor with Borofloat glass membrane

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9 Author(s)
Kap-Duk Song ; Sch. of Electron. & Electr. Eng., Kyungpook Nat. Univ., South Korea ; Jung-II Bang ; Sang-Rok Lee ; Yang-Rye Lim
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We report on the fabrication and characteristics of micro hot wire sensor with Borofloat glass membrane on diaphragm by using anodic bonding. Borofloat membrane was thermally stable and strong for mechanical stress. The four types of sensing materials SnO2, In2O3 and mixed oxide of adequate ratio with these two type metal oxide semiconductor were prepared by thermal evaporation method and then oxidized at 600 °C, 3 hrs. Various sensing materials for NOx, CO, etc. were prepared. And then the response characteristics were investigated. For mixed oxide semiconductor with Sn and In oxide, these showed the high sensitivity for NOx and CO gas. And by using the Borofloat glass substrate, the power consumption was much reduced about 60 mW in condition of the best sensitivity.

Published in:

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on  (Volume:2 )

Date of Conference:

5-9 June 2005