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A new electrical recording neural probe integrated with chemical stimulation

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12 Author(s)
Kyo-in Koo ; Sch. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ., South Korea ; Hum Chung ; Youngsuk Yu ; Jongmo Seo
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This paper presents an integrated neural probe that can be used as a neural signal recorder as well as a chemical stimulator. The single unit integrated probe features in-plane shanks with buried microchannels and low impedance microelectrodes. The fabricated neural probe has three 3 mm-long shanks with a 10 μm-diameter microchannel and six 30 μm × 30 μm square gold microelectrodes per shank. The measured impedance magnitude and the phase shift of the microelectrodes are 23.1 kΩ/900 μm2 and 52.9° at 1 kHz, respectively.

Published in:

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on  (Volume:2 )

Date of Conference:

5-9 June 2005