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Novel pattern transfer technique on flexible polymer structure for advanced microfluidic systems

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3 Author(s)
Janggil Kim ; Inst. of Ind. Sci., Tokyo Univ., Japan ; Takama, N. ; Beomjoon Kim

In this paper, a new pattern transfer technique into a flexible polymer structure is presented. Au and Cu micro patterns are transferred to a polydimethylsiloxane (PDMS) sheet through a lift-off method. Alkylsilane and alkanethiol SAMs are used for the surface modification to form an anti-adhesive layer or an adhesive layer, respectively. As a result, various types of Au and Cu patterns are transferred to a PDMS substrate successfully. The stability of the patterns on the PDMS sheet is confirmed by a simple scratch test of the surface. In addition, the experimental results under the various conditions will be shown.

Published in:

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on  (Volume:2 )

Date of Conference:

5-9 June 2005