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Scaling effects of micro bubble actuators

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3 Author(s)
Deng, Peigang ; Dept. of Mech. Eng., Hong Kong Univ. of Sci. & Technol., Kowloon, China ; Yi-Kuen Lee ; Ping Cheng

Although microthermal bubble actuation has been applied in many MEMS/BioMEMS devices, little research work has been addressed the scaling of microbubble actuators. In this work, the fundamental investigation of the scaling effects of microbubble actuators is reported. Using a 1.66 ms-wide heating pulse, micro boiling in water was studied on various microbubble actuators, of which feature sizes range from 0.5 μm to 70 μm. We found that there existed a critical heater size (10 μm), for which the boiling pattern with size below or above 10 μm were quite different.

Published in:

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on  (Volume:2 )

Date of Conference:

5-9 June 2005