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Micromachined Fourier transform spectrometer on silicon optical bench platform

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5 Author(s)
Kyoungsik Yu ; Korea Electr. Eng. & Sci. Res. Inst., Seoul, South Korea ; Daesung Lee ; Uma Krishnamoorthy ; Namkyoo Park
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We present a miniaturized Fourier transform spectrometer implemented on a silicon optical bench platform. The optical and opto-mechanical components of a Michelson interferometer, such as a beam splitter, micromirrors, MEMS actuators, and fiber U-grooves, are simultaneously fabricated by micromachining of the device layer of a silicon-on-insulator wafer. Our bulk micromachining process combines the flexible definition capability of deep reactive ion etching with the good surface quality provided by anisotropic KOH wet-etching. A spectral resolution of 45 nm near 1550 nm wavelength is demonstrated.

Published in:

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.  (Volume:2 )

Date of Conference:

5-9 June 2005