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This paper described the concept of a probe array for the measurement of biological properties and showed the implementation of a novel probe array for the biological measurement using MEMS technology. We experimentally show the feasibility of the micromachined probe array for biological application through this work. Many researchers have performed the dielectric measurement of liquids or biological samples using a single probe which is manufactured by laser machining. They should perform repetitive experiments point by point to obtain the biological properties of multiple points using a single probe. Moreover the size of single probe and Subminiature A (SMA) connector, which is connected with probe and test cable of network analyzer, are limited and the cost of probe and connector are very high. However, we could obtain the biological information of multiple points by one contact with a sample using the micromachined probe array at a time. Also we can reduce the size and cost of probe using wafer level process.
Date of Conference: 5-9 June 2005