By Topic

Large aperture deformable mirror with a transferred single-crystal silicon membrane actuated using large-stroke PZT unimorph actuators

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Y. Hishinuma ; Jet Propulsion Lab., Pasadena, CA, USA ; Eui-Hyeok Yang

We have demonstrated a large aperture (50 mm × 50 mm) continuous membrane deformable mirror (DM) with a large-stroke piezoelectric unimorph actuator array. The DM consists of a continuous, large aperture, silicon membrane "transferred" in its entirety onto a 20 × 20 piezoelectric unimorph actuator array. A PZT unimorph actuator, 2.5 mm in diameter with optimized PZT/Si thickness and design showed a deflection of 5.7 μm at 20 V. An assembled DM showed an operating frequency bandwidth of 30 kHz and influence function of approximately 30 %.

Published in:

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.  (Volume:2 )

Date of Conference:

5-9 June 2005