Cart (Loading....) | Create Account
Close category search window
 

Integrated chemical microsensor systems in CMOS-technology

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

1 Author(s)
Hierlemann, A. ; Phys. Electron. Lab., ETH Zurich, Switzerland

The aim in utilizing microfabrication techniques and CMOS technology for chemical sensors is to devise more intelligent, more autonomous, more integrated, and more reliable gas sensor systems at low costs in a generic approach. Since the sensor market is strongly fragmented, i.e., there exists a large variety of applications with different needs and sensor requirements, a modular approach or "toolbox strategy" relying on CMOS as platform technology was identified as a very promising approach. The application then dictates the microsensor system architecture and the nature of its components: As soon as the target analytes and their concentrations as well as the boundary conditions of detection are specified, the optimum transducer, the necessary driving and signal conditioning circuitry, as well as interface and communication units can be selected from the CMOS-toolbox, and the different modules can then be combined to arrive at a custom-designed monolithic CMOS microsensor system. Several examples of monolithically integrated chemical microsensor systems are presented. The evolution from single transducers, which are integrated with the necessary driving and signal conditioning circuitry, to monolithic multi-sensor arrays and fully developed systems with on-chip sensor control and standard interfaces is shown.

Published in:

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on  (Volume:2 )

Date of Conference:

5-9 June 2005

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.