Cart (Loading....) | Create Account
Close category search window
 

Integration of MEMS with a SoC in a microrobot

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Olivier-Don Truong ; Departement de Genie Informatique, Ecole Polytechnique de Montreal, Que., Canada ; Kaou, N. ; Martel, S.

This article presents an integration technique for electrostatic motors with a SoC-type microelectronic circuit for design of a miniature robot of size 3 mm × 3 mm × 3 mm. More precisely, a technique of assembling the parts of a microrobot with the aid of a mould and a compact interconnection technique integrable on a three dimensional structure with the aid of microfabrication techniques.

Published in:

IEEE-NEWCAS Conference, 2005. The 3rd International

Date of Conference:

19-22 June 2005

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.