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Integration of MEMS with a SoC in a microrobot

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3 Author(s)
Olivier-Don Truong ; Departement de Genie Informatique, Ecole Polytechnique de Montreal, Que., Canada ; Kaou, N. ; Martel, S.

This article presents an integration technique for electrostatic motors with a SoC-type microelectronic circuit for design of a miniature robot of size 3 mm × 3 mm × 3 mm. More precisely, a technique of assembling the parts of a microrobot with the aid of a mould and a compact interconnection technique integrable on a three dimensional structure with the aid of microfabrication techniques.

Published in:

IEEE-NEWCAS Conference, 2005. The 3rd International

Date of Conference:

19-22 June 2005

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