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The paper describes a new three-dimensional (3D) MEMS optical switch. The switch consists of a collimator array for generating optical beams, and a MEMS mirror array for changing the directions of the beams. Each of the 18 optical ports can be either an input or an output, giving the switch a flexible configuration of 8×8, 2×16, and so on. The mirrors and the collimators are assembled passively in a compact package measuring 80×30×12 mm3. The mean of measured insertion losses of all 64 paths in an 8×8 switch configuration was 1.1 dB; this confirms the low insertion loss of the developed switch.
Date of Conference: 5-9 June 2005