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Low-insertion-loss compact 3D-MEMS optical matrix switch with 18 input/output ports

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9 Author(s)
Kazama, A. ; Mech. Eng. Res. Lab., Hitachi Ltd., Japan ; Itou, Y. ; Horino, M. ; Fukuda, K.
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The paper describes a new three-dimensional (3D) MEMS optical switch. The switch consists of a collimator array for generating optical beams, and a MEMS mirror array for changing the directions of the beams. Each of the 18 optical ports can be either an input or an output, giving the switch a flexible configuration of 8×8, 2×16, and so on. The mirrors and the collimators are assembled passively in a compact package measuring 80×30×12 mm3. The mean of measured insertion losses of all 64 paths in an 8×8 switch configuration was 1.1 dB; this confirms the low insertion loss of the developed switch.

Published in:
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on  (Volume:1 )

Date of Conference: 5-9 June 2005

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