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Fabrication and testing of three-dimensional stages providing displacement of up to 8 μm

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1 Author(s)
Y. Ando ; Adv. Manuf. Res. Inst., Nat. Inst. of Adv. Ind. Sci. & Technol., Ibaraki, Japan

We have designed and fabricated 3D stages driven by electrostatic comb actuators, which are to be substituted for a PZT tube scanner in a scanning probe microscope (SPM) system. The 3D stage consisted of traveling tables, suspensions and comb actuators, which were fabricated in 20 μm-silicon-layer on an SOI (silicon on insulator) wafer using a DRIE (deep reactive ion etching) process. The DRIE process was also used to form inclined leaf springs in the suspensions. The 3D stage was installed in a commercial SPM system, and surface topography measurements were carried out to determine the performance.

Published in:

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.  (Volume:1 )

Date of Conference:

5-9 June 2005