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Ti-Ni SMA film actuated Si cantilever beams for MEMS probe card

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5 Author(s)
T. Namazu ; Dept. of Mech. & Syst. Eng., Univ. of Hyogo, Japan ; S. Inoue ; Y. Tashiro ; Y. Okamura
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We present a new MEMS probe card, which is composed of silicon (Si) cantilever beams actuated by titanium-nickel (Ti-Ni) shape memory alloy (SMA) films. Since Ti-Ni film can yield a higher work output per unit volume, the Ti-Ni film-actuated Si cantilever beam has the potential as a MEMS probe card to generate a large contact force between a probe and electrode pad. The cantilever beam produces a contact force by not only cantilever bending in contact but also the shape memory effect (SME) of Ti-Ni film arising from Joule's heating. The SME of the Ti-Ni film containing Ti atom of 50.5% to 53.2% can generate an additional contact force of 200 μN on average on applying an electric power of 500 mW to the film. The Ti-Ni film-actuated Si cantilever beam could be a key element for a successful MEMS probe card with larger contact force and smaller size.

Published in:

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.  (Volume:1 )

Date of Conference:

5-9 June 2005