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SOI micromachined 5-axis motion sensor using resonant electrostatic drive and non-resonant capacitive detection mode

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5 Author(s)
Watanabe, Y. ; MEMS Lab., Yamagata Res. Inst. of Technol., Japan ; Mitsui, T. ; Mineta, T. ; Matsu, Y.
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The paper presents a 5-axis motion sensor which can detect 3-axis acceleration and 2-axis angular rate capacitively. The sensor is fabricated by SOI bulk-micromachining, and is vacuum scaled by anodic bonding and activation of the non-evaporated getters. The sensor chip size is 5.0×5.0×1.7 mm3. By applying a Z-axis reference vibration to a proof mass with an electrostatic force at resonant frequency, 5-axis motions can be detected capacitively in a non-resonant detection mode. Measured sensitivities of X-, Y- and Z-axis acceleration were 1.9, 1.1 and 4.7 V/G, respectively. X-and Y-axis angular rate sensitivities were 6.7 and 12 mV/(deg/s), respectively.

Published in:

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on  (Volume:1 )

Date of Conference:

5-9 June 2005