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A micromachined gyroscope with piezoresistance for both high performance Coriolis-effect detection and torsional vibration monitoring

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8 Author(s)
Xuemeng Chen ; State Key Lab of Transducer Technol., Chinese Acad. of Sci., Shanghai, China ; Xinxin Li ; Zhaohui Song ; Shusen Huang
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A micromachined vibrating gyroscope with a novel piezoresistive scheme is designed, fabricated and tested. A piezoresistive sensing method for Coriolis-acceleration detection is used with both high sensitivity and high resonant frequency. A four-terminal piezoresistive element is used to monitor and stabilize the vibration amplitude of the driving mode through a feedback loop. With the same loop, temperature drift of the gyro's piezoresistive output can be on-chip compensated effectively. The gyro performance is measured, with the following results: resonance frequency in detection mode is 989 Hz; angular rate measurement range is ± 300°/s; noise-limited angular rate resolution is 0.33°/s.

Published in:

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on  (Volume:1 )

Date of Conference:

5-9 June 2005

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