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Nano-interfacial polarization on drain and source electrodes directly influences on the FET performance, because carrier injection from electrodes rules the carrier transport of organic FETs. To clarify the details, the effect of UV/ozone treatment of source and drain electrodes was examined. Significant change of the FET threshold voltage was confirmed in association with the channel formation process that can be explained assuming the carrier injection from electrodes. Finally Maxwell-Wagner model is used to explain the FET characteristics.