By Topic

Electrical properties of SBT capacitor with top electrodes

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

8 Author(s)
C. N. Cho ; Dept. of Electr. Eng., Kwangwoon Univ., Seoul, South Korea ; J. S. Kim ; Y. C. Oh ; D. K. Lee
more authors

The Sr0.8Bi2.2Ta2O9 (SBT) thin films are deposited on Pt-coated electrode (Pt/TiO2/SiO2/Si) using RF magnetron sputtering method. The electrical properties of SBT capacitors with top electrodes were studied. In the XRD pattern, the SBT thin films in all annealing temperatures had (105) orientation. In the SEM images, bi-layered perovskite phase was crystallized at 750 °C and grains largely grew in oxygen annealing atmosphere. The electrical properties of SBT capacitor with top electrodes represents a favorable properties in Pt electrode. The maximum remanent polarization and the coercive electric field with Pt electrode are 12.40μC/cm2 and 30 kV/cm respectively. The dielectric constant and leakage current density with Pt electrode is 340 and 6.81 x 10-10 A/cm2 respectively.

Published in:

Proceedings of 2005 International Symposium on Electrical Insulating Materials, 2005. (ISEIM 2005).  (Volume:3 )

Date of Conference:

5-9 June 2005