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Tunable RF and analog circuits using on-chip MEMS passive components

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2 Author(s)
G. K. Fedder ; Carnegie Mellon Univ., Pittsburgh, PA, USA ; T. Mukherjee

Micromachining in RF foundry processes enhances inductor and capacitor quality factors, increases varactor tuning range, and supports creation of electromechanical mixer-filters that downconvert RF signals from GHz to MHz frequency band with built-in frequency selectivity. An on-chip parallel receiver architecture and circuit blocks incorporating these MEMS devices for low-power operation are presented.

Published in:

ISSCC. 2005 IEEE International Digest of Technical Papers. Solid-State Circuits Conference, 2005.

Date of Conference:

10-10 Feb. 2005