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Radio-Frequency Planar Integrated Inductor With Permalloy-SiO _2 Granular Films

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4 Author(s)
Jiahao Zhao ; Dept. of Mater. Sci. & Eng., Tsinghua Univ., Beijing, China ; Zhu, Jing ; Zhongmin Chen ; Zewen Liu

We have designed and fabricated a radio-frequency (RF) planar integrated inductor using Permalloy-SiO$_2$granular film as the magnetic core. By controlling the composition and microstructure, we produced a granular film with excellent soft magnetic properties and high electrical resistivity. The inductance$L$of the inductor with granular Permalloy-SiO$_2$magnetic film increased 6% to 15%, compared to that of an air-core inductor, and the quality factor$Q$value was high, approaching 10 in the frequency range of 2–3 GHz. The controllable anisotropy of the granular film generated in deposition process gives the magnetic inductor a very high self-resonance frequency peak—over 6 GHz.

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Magnetics, IEEE Transactions on  (Volume:41 ,  Issue: 8 )