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Analytical Model for Analysis and Design of V-Shaped Thermal Microactuators

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3 Author(s)
Enikov, E.T. ; Dept. of Aerosp. & Mech. Eng., Univ. of Arizona, Tucson, AZ, USA ; Kedar, S.S. ; Lazarov, K.V.

An analytical solution of the thermoelastic bending/buckling problem of thermal microactuators is presented. V-shaped beam actuators are modeled using the theory of beam-column buckling. Axial (longitudinal) deformations including first-order nonlinear strain-displacement relations and thermal strains are included. The resulting nonlinear transcendental equations for the reaction forces are solved numerically and the solutions are compared with a nonlinear finite element (FE) model. A test actuator has also been fabricated and characterized. The obtained accuracy of the prediction is within 1.1% of the nonlinear FE solution and agrees well with the experimental data. A corresponding one-dimensional (1-D) heat transfer model has also been developed and validated against experimental i - V measurements at various temperatures. The developed analytical models are then used to analyze maximum stress and the heat transfer paths. It has been confirmed that the heat flux toward the substrate is a dominant heat dissipation route in sacrificially released devices. \hfill \hbox {[1311]}

Published in:

Microelectromechanical Systems, Journal of  (Volume:14 ,  Issue: 4 )