By Topic

On-Chip Vacuum Generated by a Micromachined Knudsen Pump

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
McNamara, Shamus ; Dept. of Electr. Eng. & Comput. Sci., Univ. of Michigan, Ann Arbor, MI, USA ; Gianchandani, Y.B.

This paper describes the design, fabrication, and testing of a single-chip micromachined implementation of a Knudsen pump, which uses the principle of thermal transpiration, and has no moving parts. A six-mask microfabrication process was used to fabricate the pump using a glass substrate and silicon wafer. The Knudsen pump and two integrated pressure sensors occupy an area of 1.5 mm$times$2 mm. Measurements show that while operating in standard laboratory conditions this device can evacuate a cavity to 0.46 atm using 80 mW input power. The pumpdown time of an on-chip chamber and pressure sensor cavity with a total volume of 80 000 cubic micrometers is only 2 s, with a peak pump speed of$1times 10^-6 cc/min$. High thermal isolation is obtained between the polysilicon heater and the rest of the device.hfillhbox[1073]

Published in:

Microelectromechanical Systems, Journal of  (Volume:14 ,  Issue: 4 )