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Polymer micro cantilevers for force controlled atomic force microscopy 3 mprovement of fabrication process

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5 Author(s)
Kato, N. ; Kinki Univ., Wakayama, Japan ; Park, C.S. ; Matsumoto, T. ; Kikuta, H.
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In this paper, we report on the improvements in fabrication processes of polymer micro cantilevers for force controlled atomic force microscopy. The improvement of photo mask patterns results in the enhancement of controllability of the pyramidal probe tip geometry and in rapid dissolving of sacrificial layer. It also contributes to process simplicity.

Published in:

SICE 2004 Annual Conference  (Volume:3 )

Date of Conference:

4-6 Aug. 2004