By Topic

Precise position control of a linear stage integrated with an inchworm type actuator

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)

The precision stage is an essential device for semiconductor equipments, fiber optic assembly systems, and micro machines. In this paper, inchworm type actuator is proposed to implement an actuator-integrated long stroke linear stage for a fiber optic device assembly system. To implement a servo system, we use an I/Q heterodyne interferometer as a position sensor, and build a state machine based controller. We propose a robust synchronized counting method to measure the position of fast moving object.

Published in:

SICE 2004 Annual Conference  (Volume:1 )

Date of Conference:

4-6 Aug. 2004