Precise position control of a linear stage integrated with an inchworm type actuator

The precision stage is an essential device for semiconductor equipments, fiber optic assembly systems, and micro machines. In this paper, inchworm type actuator is proposed to implement an actuator-integrated long stroke linear stage for a fiber optic device assembly system. To implement a servo system, we use an I/Q heterodyne interferometer as a position sensor, and build a state machine based controller. We propose a robust synchronized counting method to measure the position of fast moving object.