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Precise position control of a linear stage integrated with an inchworm type actuator

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4 Author(s)

The precision stage is an essential device for semiconductor equipments, fiber optic assembly systems, and micro machines. In this paper, inchworm type actuator is proposed to implement an actuator-integrated long stroke linear stage for a fiber optic device assembly system. To implement a servo system, we use an I/Q heterodyne interferometer as a position sensor, and build a state machine based controller. We propose a robust synchronized counting method to measure the position of fast moving object.

Published in:

SICE 2004 Annual Conference  (Volume:1 )

Date of Conference:

4-6 Aug. 2004