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Novel high-performance pressure sensors using double SOI structures

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5 Author(s)
Chung, G.-S. ; Dept. of Electr. & Electron. Eng., Toyohashi Univ., of Technol., Japan ; Kawahito, S. ; Ashiki, M. ; Ishida, M.
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High-performance pressure sensors using

Published in:

Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on

Date of Conference:

24-27 June 1991