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A new modal mode controlling method for a surface format surrounding mass accelerometer

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2 Author(s)
K. Yamada ; NEC Corp., Kanagawa, Japan ; T. Kuriyama

A new model mode controlling method for a surface format surrounding mass accelerometer is presented. The controlling method can attain a stable feedback control without imposing a degree-of-freedom limitation on the sensor structure by using a multi-force balancing system. The controlling is based on the finite element method simulation result for the accelerometer structure and the fact that almost all vibrations occurring in the accelerometer in a normal vibrational environment can be expressed by a very small number of vibrational mode series. For this work, an application for the surface format surrounding mass accelerometer is presented as a demonstration.<>

Published in:

Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on

Date of Conference:

24-27 June 1991