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Miniature Fabry-Perot interferometers micromachined in silicon for use in optical fiber WDM systems

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2 Author(s)
Jerman, J.H. ; IC Sensors, Milpitas, CA, USA ; Clift, D.J.

The techniques of silicon micromachining have been used to fabricate a second-generation Fabry-Perot interferometer for use in the near-infrared spectral region. These devices provide a sharp optical transmission peak which can be used as wavelength division demultiplexers in optical fiber communications systems. The wavelength tuning and parallelism control of the mirror elements are achieved electrostatically, by varying the voltage between control electrodes. This second-generation device includes a thin, etch-stopped corrugated diaphragm as the suspension for the movable element.<>

Published in:

Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on

Date of Conference:

24-27 June 1991