By Topic

Digital compensated capacitive pressure sensor using CMOS technology for low pressure measurements

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

7 Author(s)
Nagata, T. ; Toyoda Machine Works Ltd,., Aichi, Japan ; Terabe, H. ; Kuwahara, S. ; Sakurai, S.
more authors

A capacitive pressure sensor with digital output for low-pressure measurements has been fabricated using CMOS technology. The sensor output has been compensated and adjusted by a newly developed method. The sensor has the hybrid configuration of a sensor chip and a digital IC chip. The sensor chip consists of a sensor capacitor, a reference capacitor, and two capacitance-to-frequency converter circuits. The digital IC chip consists of a clock generator, a timing circuit, and a 12-b up/down counter. The thermal sensitivity shift and the thermal zero shift of the output were compensated at the sensor chip. The offset and full scale span of the output were compensated at the sensor chip. By using the novel compensation and adjustment technique, a thermal sensitivity shift of 0.026%F.S./ degrees C and a thermal zero shift of 0.013%F.S./ degrees C for a pressure range of 0-200 mmH/sub 2/O and a temperature range of 25-75 degrees C were obtained.<>

Published in:

Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on

Date of Conference:

24-27 June 1991