Cart (Loading....) | Create Account
Close category search window
 

The analysis of capacitive pressure sensors with large deflection

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Tong, Lijun ; Dept. of Electr. Eng. & Appl. Phys., Case Western Reserve Univ., Cleveland, OH, USA ; Jen-Tai Hsu ; Ko, W.H. ; Xiaoyi Ding

A set of analytical equations for the calculation of large deflection of square or rectangular boron-doped P/sup +/-Si diaphragms under pressure is obtained. Based on these equations and the mechanical properties of the Si thin diaphragm, such as the residual stresses, direct and shearing stresses, and Young's modulus, a computer program using a personal computer was developed to calculate the deformation of the boron-doped P/sup +/-Si thin diaphragm, and the capacitance and sensitivity of a silicon capacitive sensor. A calculated curve for capacitive sensors with a thin silicon diaphragm agrees well with the measured results of those sensors. This simulation can be a simple but useful tool for the design of a large-deformation silicon capacitive pressure sensor.<>

Published in:

Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on

Date of Conference:

24-27 June 1991

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.