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Wide range pyroelectric anemometers for gas flow measurements

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3 Author(s)
Hsieh, H.Y. ; Dept. of Electr. Eng., Pennsylvania Univ., Philadelphia, PA, USA ; Spetz, A. ; Zemel, J.N.

Studies of pyroelectric anemometers (PAs) have demonstrated that these sensors have an extraordinarily wide operational range and excellent resolution. Measurements were conducted in two structures: a 3.3-mm-diameter pipe with an anemometer located in the center of the pipe and a 4.5-cm-diameter pipe with anemometers placed in the center and on the walls of the pipe. These measurements demonstrated that the PA can detect flows from approximately 1 mL/min to over 20 L/min in the 3.3-mm-diameter tube. Based on the measurements, It is concluded that the PA shows promise as a good flow transfer standard and as a candidate for monitoring extremely low flow rates.<>

Published in:

Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on

Date of Conference:

24-27 June 1991