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The coming opportunities in microsensor systems

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2 Author(s)
Wise, K.D. ; Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA ; Najafi, N.

Challenges and opportunities confronting the development of integrated sensing systems in the 1990s are discussed. Silicon microsensors can offer significant advantages over alternative technologies, employing features such as self-testing, autocalibration, digital compensation, and bus-compatibility to improve system reliability and performance while reducing cost. A system architecture which permits all of these features to be implemented is described. Each node in this distributed sensing system is composed of sensors, actuators, and a monolithic microprocessor-driven interface chip and is realized as a multichip module. A discrete prototype of this system achieves 12-b accuracy with the ability to read over 700 sensors per second. All data transfers include parity checking and polynomial-based sensor data compensation in the host computer. Over 300 Mbytes of data have been transferred error-free. Needs for further research in these areas are described, and the application of the prototype system to the measurement of pressure, flow, wafer temperature, and other variables in a reactive ion etching system is discussed.<>

Published in:

Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on

Date of Conference:

24-27 June 1991