Cart (Loading....) | Create Account
Close category search window
 

The coming opportunities in microsensor systems

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Wise, K.D. ; Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA ; Najafi, N.

Challenges and opportunities confronting the development of integrated sensing systems in the 1990s are discussed. Silicon microsensors can offer significant advantages over alternative technologies, employing features such as self-testing, autocalibration, digital compensation, and bus-compatibility to improve system reliability and performance while reducing cost. A system architecture which permits all of these features to be implemented is described. Each node in this distributed sensing system is composed of sensors, actuators, and a monolithic microprocessor-driven interface chip and is realized as a multichip module. A discrete prototype of this system achieves 12-b accuracy with the ability to read over 700 sensors per second. All data transfers include parity checking and polynomial-based sensor data compensation in the host computer. Over 300 Mbytes of data have been transferred error-free. Needs for further research in these areas are described, and the application of the prototype system to the measurement of pressure, flow, wafer temperature, and other variables in a reactive ion etching system is discussed.<>

Published in:

Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on

Date of Conference:

24-27 June 1991

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.