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High-performance thin-film transistors in low-temperature crystallized LPCVD amorphous silicon films

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2 Author(s)
Hatalis, M.K. ; Carnegie Mellon University, Pittsburgh, PA ; Greve, D.W.

Thin-film transistors (TFT's) were fabricated in low-temperature (550°C) crystallized amorphous LPCVD silicon films. The performance of these devices was found to depend upon the deposition temperature. Low threshold voltages and effective mobilities as high as 32 cm2/V.s are reported for devices fabricated in 150-nm-thick films with maximum processing temperature of 860°C. The performance of these devices is shown to be far superior to devices fabricated in as-deposited polycrystalline silicon films.

Published in:

Electron Device Letters, IEEE  (Volume:8 ,  Issue: 8 )