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Measurement of steady-state minority-carrier transport parameters in heavily doped n-type silicon

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2 Author(s)
del Alamo, J.A. ; NTT Laboratories, Kanagawa, Japan ; Swanson, R.M.

The relevant hole transport and recombination parameters in heavily doped n-type silicon under steady state are the hole diffusion length and the product of the hole diffusion coefficient times the hole equilibrium concentration. These parameters have measured in phosphorus-doped silicon grown by epitaxy throughout nearly two orders of magnitude of doping level. Both parameters are found to be strong functions of donor concentration. The equilibrium hole concentration can be deduced from the measurements. A rigid shrinkage of the forbidden gap appears as the dominant heavy doping mechanism in phosphorus-doped silicon.

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Electron Devices, IEEE Transactions on  (Volume:34 ,  Issue: 7 )