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Silicon photodetector structure for direct coupling of optical fibers to integrated circuits

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7 Author(s)
Ade, R.W. ; Columbia University, New York, NY ; Harstead, E.E. ; Amirfazli, A.H. ; Cacouris, T.
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A novel detector structure exhibiting real-estate efficient coupling of optical fibers to semiconductor devices is described. The integrated fiber-optic coupler employs vertical insertion of a tapered single-mode fiber into a laser-etched cylindrical hole in the substrate. It features a small surface footprint, mechanical stability, and accurate alignment. Fabricated in silicon, the p-n junction detectors have typically shown responsivities of 0.23 A/W at 0.63 µm, corresponding to a quantum efficiency of 45 percent, and dark currents below 1 nA.

Published in:

Electron Devices, IEEE Transactions on  (Volume:34 ,  Issue: 6 )

Date of Publication:

Jun 1987

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