Cart (Loading....) | Create Account
Close category search window

Imaging and detection of current conduction in dielectric films by emission microscopy

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Chiang, Ching-Lang ; Intel Corporation, Santa Clara, CA ; Khurana, Neeraj

Current conduction in dielectric films has been studied by Emission Microscopy. By combining optical microscopy with the latest night vision technology and the computer image processing techniques, we have been able to image the extremely faint light emission accompanying current conduction in a dielectric film on silicon substrate. We have found that current flows uniformly in an undamaged capacitor initially. The capacitor then breaks down after conducting a certain amount of charge and current flow becomes constricted into the failure location. To date, we have achieved a sensitivity of 10pA/µm2uniform current conduction through a 250Å undamaged oxide. For a damaged oxide, our sensitivity is 50nA at 12V or 300nA at 5V, strongly depending on the degree of damage. The spatial resolution achieved is 0.5µm. With its unprecedented capability, Emission Microscopy can be readily used to study the physical mechanisms of dielectric conduction and pinpoint the location of gate dielectric failure.

Published in:

Electron Devices Meeting, 1986 International  (Volume:32 )

Date of Conference:


Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.