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Browse Journals & Magazines > Electron Devices, IEEE Transa ...> Volume:33 Issue:2 Help

Auto-calibrated potential map drawing equipment and its application to characterization of plasma-coupled devices

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2 Author(s)
Tamama, T. ; NTT Atsugi Electrical Communication Laboratories, Kanagawa, Japan ; Kuji, N.

By utilizing the voltage contrast mode observed in a scanning electron microscope, the authors have fabricated equipment which they call auto-calibrated potential map drawing equipment (AP-MADE). This equipment can be used to observe the two-dimensional potential distribution on a semiconductor device surface and to draw its equipotential curves. Therefore, it can be used as a semiconductor device analyzer. Utilizing the APMADE, the transfer characteristics of plasma-coupled devices are analyzed in detail and its best asymmetric structure is pointed out quantitatively.

Published in:
Electron Devices, IEEE Transactions on  (Volume:33 ,  Issue: 2 )

Date of Publication: Feb 1986

Page(s):
192 - 197
ISSN :
0018-9383
Digital Object Identifier :
10.1109/T-ED.1986.22464
Product Type:
Journals & Magazines
Date of Current Version :
09 August 2005
Issue Date :
Feb 1986
Sponsored by :
IEEE Electron Devices Society

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