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Prospects of SST technology for high speed LSI

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4 Author(s)
Sakai, T. ; NTT Kanagawa, Japan ; Konaka, S. ; Yamamoto, Y. ; Suzuki, M.

SST has realized very high speed integrated circuits with a basic gate delay time of 25.8 ps/gate. Also, a 10.38 GHz frequency divider, a 0.85 ns 1 Kb RAM and a 6 ns 16×16 bit parallel multiplier are fabricated using SST with 1um optical lithography. For a scaled-down SST transistor, the basic gate delay time is expected to be less than 10 ps/gate.

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Electron Devices Meeting, 1985 International  (Volume:31 )

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