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Enhancement of hot-electron currents in graded-gate-oxide (GGO)-MOSFETs

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5 Author(s)
Ko, P.K. ; University of California, Berkeley, CA ; Tam, S. ; Hu, C. ; Wong, S.S.
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Graded-Gate-Oxide(GGO)-MOSFETs with various degrees of gate-drain(source) overlap (and grading thickness of the gate oxide near the polysilicon-gate edge) have been investigated for hot-electron generation. Compared with a conventional MOSFET, the GGO-MOSFET exhibits higher substrate and gate currents when the gate voltage is raised above a critical value(Vgc). Vgc is found to be dependent on the drain voltage. It is also a smooth function of the degree of gate-drain(source) overlap which can be controlled by the fabrication process. These experimental findings are supported by results obtained from the two-dimensional analysis of a similar device structure. Implications of the GGO phenomena on MOS technologies are discussed. Possible use of the GGO-MOSFET in EPROM is proposed.

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Electron Devices Meeting, 1984 International  (Volume:30 )

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