Status and trends of I2L/MTL technology

The integrated Injection Logic or Merged Transistor Logic (I
²
L/MTL) techniques have led to attractive VLSI products, such as 16 bit microprocessors with 600 logic gates/mm
²
of 3 ns delay or 18 k bit static RAM's of 30 ns access. Even 64 k SRAM's of 25 ns access are feasible in today's manufacturing processes. Moreover, recent technology advancements significantly extend the potential of I
²
L/MTL. Polysilicon self-alignment techniques enable logic circuit delays in the subnanosecond range, and deep-groove dielectric isolation schemes considerably enhance the density and performance of static RAM's in conjunction with new cell design techniques.