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Browse Journals & Magazines > Electron Devices, IEEE Transa ...> Volume:30 Issue:11 Help

VIB-3 defect structure and electrical property modifications caused by reactive ion etching and ion beam etching

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7 Author(s)
Fonash, S.J. ; Singh, R. ; Climent, A. ; Rohatgi, A.
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First Page of the Article

Published in:
Electron Devices, IEEE Transactions on  (Volume:30 ,  Issue: 11 )

Date of Publication: Nov 1983

Page(s):
1613 - 1614
ISSN :
0018-9383
Digital Object Identifier :
10.1109/T-ED.1983.21413
Product Type:
Journals & Magazines
Date of Current Version :
09 August 2005
Issue Date :
Nov 1983
Sponsored by :
IEEE Electron Devices Society

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