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Monolithic integrated direction-sensitive flow sensor

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3 Author(s)
Huijsing, J.H. ; Delft University of Technology, Delft, The Netherlands ; Schuddemat, J.P. ; Verhoef, W.

A manolithic integrated direction-sensitive flow sensor for measuring the velocity of gas or liquid flow is described. Its operation is based on the transfer of heat from a heated chip to a flowing fluid. Temperature differences on the chip are a measure for the flow velocity and flow direction in a plane parallel with the chip's surface. The sensor can be embedded in a wall, for example, in a wall of a tube conducting a fluid flow, and can be shielded from a direct contact with the fluid. Measurements are stated for velocities in a range below 3 m/s for air at room temperature.

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Electron Devices, IEEE Transactions on  (Volume:29 ,  Issue: 1 )